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专利名称：Polishing head testing with movable
pedestal
发明人：Jeffrey P. Schmidt,Jay Rohde,Stacy Meyer申请号：US12829971申请日：20100702公开号：US080041B2公开日：20110830
专利附图：
摘要：A polishing head is tested in a test station having a pedestal for supporting atest wafer and a controllable pedestal actuator to move a pedestal central wafersupport surface and a test wafer toward the polishing head. In another aspect of the
present description, the test wafer may be positioned using a positioner having a firstplurality of test wafer engagement members positioned around the pedestal centralwafer support surface. In another aspect, the wafer position may have a second pluralityof test wafer engagement members positioned around an outer wafer support surfacedisposed around the pedestal central wafer support surface and adapted to support atest wafer. The second plurality of test wafer engagement members may be distributedabout a second circumference of the ring member, the second circumference having awider diameter than the first circumference. Additional embodiments and aspects aredescribed and claimed.
申请人：Jeffrey P. Schmidt,Jay Rohde,Stacy Meyer
地址：San Jose CA US,Round Rock TX US,San Jose CA US
国籍：US,US,US
代理机构：Fish & Richardson P.C.
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