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专利名称：LINEAR MOTOR ACTUATOR发明人：Yoshihiro Kimura申请号：US13500184申请日：20100908
公开号：US20120200178A1公开日：20120809
专利附图：
摘要：Provided is a linear motor actuator capable of eliminating an influence to beexerted onto linear guides () due to heat generated by a coil unit (), sufficiently securingmoving accuracy and positioning accuracy of a table plate () supported by the linearguides (), and in addition, maintaining the accuracies over a long period of time. The linear
motor actuator includes: a base plate () to be fixed to another mechanical apparatus; aplurality of linear guides () disposed parallel to each other on the base plate (); a tableplate (), which is supported by the plurality of linear guides () and freely reciprocatesabove the base plate (); a magnet unit () provided on the table plate (); and a coil unit ()provided on the base plate () so as to be opposed to the magnet unit () to form a linearmotor (). The base plate () and the table plate () are each made of a material having acoefficient of linear expansion of 11×10(1/° C.) or less, and a difference is providedbetween the coefficients of linear expansion of the base plate () and the table plate ().
申请人：Yoshihiro Kimura
地址：Tokyo JP
国籍：JP
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