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专利名称：System and method for determining the
center of a wafer on a wafer table
发明人：Balamurugan Subramanian申请号：US09080902申请日：19980518公开号：US06374149B1公开日：20020416
专利附图：
摘要：A method for determining the center () of a silicon wafer () on a wafer table () isprovided. The method includes measuring silicon wafer data with a sensor (). The siliconwafer data is received at a wafer center computing system (). The coordinates of the
wafer center (Xw,Yw) in a wafer table Cartesian coordinate system () are computed. Thecoordinates of the edge of the silicon wafer () are then determined from the wafer centercoordinates (Xw,Yw).
申请人：TEXAS INSTRUMENTS INCORPORATED
代理人：Wade James Brady III,Frederick J. Telecky Jr.
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