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专利名称：MEMS electrostatic actuator
发明人：Arun Kumar Gupta,William Craig McDonald申请号：US14691962申请日：20150421公开号：US09263973B2公开日：20160216
专利附图：
摘要：A MEMS electrostatic actuator includes a bottom plate affixed to a substrateand a top plate suspended above the bottom plate. The top plate has a parallel platecenter section and two rotating members electrically connected to the center section.Each rotating member is attached centrally of the rotating member for rotation about an
axis of rotation to a set of anchor posts. The attachment includes at least one pair oftorsional springs attached along each axis, each spring comprising a rectangular metalsquare that twists as the rotational members rotate. Electrostatic pull-down electrodesare underneath each rotational member.
申请人：TEXAS INSTRUMENTS INCORPORATED
地址：Dallas TX US
国籍：US
代理人：Jacqueline J. Garner,Frank D. Cimino
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