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专利名称：MEMS digital linear actuator
发明人：Robert J. Calvet,Roman C. Gutierrez,Darrell
Harrington,Tony K. Tang
申请号：US11190307申请日：20050726
公开号：US20070024155A1公开日：20070201
专利附图：
摘要：In accordance with an embodiment of the present invention, an electrostaticactuator has a base having a plurality of base pillars formed thereon and has a stagehaving a plurality of stage pillars formed thereon. The controlled application of voltage
signals to the base pillars and/or the stage pillars results in electrostatic force thateffects movement of the stage with respect to the base.
申请人：Robert J. Calvet,Roman C. Gutierrez,Darrell Harrington,Tony K. Tang
地址：Pasadena CA US,Arcadia CA US,Pasadena CA US,Glendale CA US
国籍：US,US,US,US
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