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专利名称：Shape measuring apparatus and shape
measurement error correction method
发明人：Nakagawa, Hideyuki,Ishikawa, Nobuhiro申请号：EP15155229.6申请日：20150216公开号：EP29104B1公开日：20160420
摘要：A calculator (212) includes a first filter (2121a), a second filter (2121b), and anadding device (2121c). The first filter (2121a) outputs, as a first corrected value, a value inwhich displacement of a displacement table detected by a scale has been correctedbased on first frequency transfer characteristics from a scale to a measured objectstation. The second filter (2121b) outputs, as a second corrected value, a value in whichthe first corrected value is corrected based on second frequency transfer characteristicsfrom a ball tip to a ball tip displacement detector. The adding device (2121c) adds thesecond corrected value and displacement of the ball tip detected by the ball tipdisplacement detector to calculate a measured value.
申请人：MITUTOYO CORP
地址：JP
国籍：JP
代理机构：Gill Jennings & Every LLP
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