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专利名称：COORDINATE POSITION MEASURING BY
IMAGING A MOVABLE GRATING ONTO APARALLEL REFERENCE GRATING
发明人：GREY U,DT,KLIMMER W,DT申请号：US3791742D申请日：19730306公开号：US3791742A公开日：19740212
摘要：In order to position a slide relative to two coordinate directions, two gratingsare used, the rules thereon being parallel to each other and non-parallel to neither ofthe coordinate directions and in which one of the gratings is integral with said slide.
申请人：JENOPTIK JENA GMBH,DT
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